Soft x-ray projection system for robust roundness measurements

Raimund Volk; Ernst Neumann; Alexander Warrikhoff; Randolf Hanke; Stefan Kasperl; Christoph Funk; Jochen Hiller; Michael Krumm; Sudarsan Acharya; Frank Sukowski; Norman Uhlmann; Rolf Behrendt; Robert Schmitt; Andreas Hamacher; Björn Damm

doi:10.1117/12.827330

17 June 2009 Soft x-ray projection system for robust roundness measurements

Raimund Volk, Ernst Neumann, Alexander Warrikhoff, Randolf Hanke, Stefan Kasperl, Christoph Funk, Jochen Hiller, Michael Krumm, Sudarsan Acharya, Frank Sukowski, Norman Uhlmann, Rolf Behrendt, Robert Schmitt, Andreas Hamacher, Björn Damm

Author Affiliations +

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 73890T (2009) https://doi.org/10.1117/12.827330
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

When integrating optic measurement systems into or next to the production line for part inspection and control of the production process requirements for measurement devices like the measurement time and the measurement uncertainty have to be expanded by a requirement for the robustness of the measurement system. A novel optic measurement system will be presented which is designed for the robust measurement of roundness of shafts next to the production line which is not influenced by residues of the manufacturing process, e.g. cooling lubricant. The measurement system is based on projecting the shadow of a shaft onto a detector and measuring the cast edges to derive the roundness of the shaft. The main parts of the measuring system consist of a soft X-ray micro focus tube, a highly precise angle measurement system and a CCD-detector. In contrast to roundness measurement instruments which are based on visible light and a telecentric optical path, new algorithms to calibrate the soft X-ray measurement instrument are being developed because of the divergent ray distribution of the soft X-rays. This paper will introduce the design and the main elements of the novel soft X-ray projection system as well as algorithms needed to conduct the roundness measurements. An estimation of accuracy and precision for small diameter shafts is presented as well as possibilities to achieve the invariance up to residues of the manufacturing process.

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Raimund Volk, Ernst Neumann, Alexander Warrikhoff, Randolf Hanke, Stefan Kasperl, Christoph Funk, Jochen Hiller, Michael Krumm, Sudarsan Acharya, Frank Sukowski, Norman Uhlmann, Rolf Behrendt, Robert Schmitt, Andreas Hamacher, and Björn Damm "Soft x-ray projection system for robust roundness measurements", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73890T (17 June 2009); https://doi.org/10.1117/12.827330

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KEYWORDS

X-rays

Sensors

Tungsten

Contamination

Edge detection

Molybdenum

Detection and tracking algorithms

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