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17 June 2009 Phase analysis error reduction in the Fourier transform method using a virtual interferogram
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Abstract
We propose a new method for reducing ripple phase errors in the fringe analysis by the Fourier transform method. Object profiles obtained by the conventional Fourier transform method tend to have ripple errors at the boundary edges of the fringe pattern. The shape of these ripple phase errors are found to have certain systematic relations to low order components of the phase and intensity distributions, which can be modeled by polynomials (such as Zernike polynomials). We estimate the systematic ripple errors by analyzing a virtual interferogram which is numerically created with models of the intensity and the phase. Starting from a rough initial guess, the virtual interferogram is sequentially improved by an iterative algorithm. Results of simulations and experiments that demonstrate the validity of the proposed method are presented.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. Toba, Z. Liu, S. Udagawa, N. Fujiwara, S. Nakayama, T. Gemma, and M. Takeda "Phase analysis error reduction in the Fourier transform method using a virtual interferogram", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 738910 (17 June 2009); https://doi.org/10.1117/12.825200
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