17 June 2009 All-interferometric six-degrees-of-freedom sensor based on laser self-mixing
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Abstract
We report on the development of an all-interferometric sensor based on the laser-self-mixing for the simultaneous detection of multi-degrees-of-freedom displacement of a remote target. The prototype system consists only of a laser head, equipped with 6 diode lasers and a properly designed reflective target. Information on a single degree-of-freedom motion is extracted by the differential measurement of two linear displacements by means of two nominally identical self-mixing interferometers. The sensor has been experimentally tested to measure yaw, pitch, roll, straightness and flatness corrections over a continuous linear range of 1 m, with resolutions of 0.7 μm (longitudinal), 20 μm (straightness and flatness), 0.001° (yaw and pitch) and 0.015 °(roll).
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Simona Ottonelli, Simona Ottonelli, Francesco De Lucia, Francesco De Lucia, Maurizio Dabbicco, Maurizio Dabbicco, Gaetano Scamarcio, Gaetano Scamarcio, } "All-interferometric six-degrees-of-freedom sensor based on laser self-mixing", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73891L (17 June 2009); doi: 10.1117/12.827345; https://doi.org/10.1117/12.827345
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