Simulation and fabrication of white light confocal microscope to attain the surface profile using CCD and image processing techniques

E. Behroodi; A. Mousavian; H. Latifi

doi:10.1117/12.827471

17 June 2009 Simulation and fabrication of white light confocal microscope to attain the surface profile using CCD and image processing techniques

E. Behroodi, A. Mousavian, H. Latifi

Author Affiliations +

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 73892U (2009) https://doi.org/10.1117/12.827471
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

An instrument to attain surface topography is White Light Confocal Microscope (WLCM).WLCM utilizes a spectrometer to analyze the scattering wavelength from the surface of a specimen. In this paper we used a CCD and some image processing techniques instead of spectrometer to determine the scattered wavelength. Both simulation (By Zemax Optical Design Software) and experiment have been performed. To reach the longitudinal chromatic aberration, two biconvex lenses with longitudinal chromatic aberration were used in the simulation and the experiment. Also, the lateral resolution is provided by a 40X microscope objective lens. The white light source of the experiment setup is a Xenon lamp and the used wavelength ranges from 420 nm to 630 nm. Comparison of the results showed an acceptable conformity between the simulation and the experiment. Finally, the topography of the surface was achieved.

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E. Behroodi, A. Mousavian, and H. Latifi "Simulation and fabrication of white light confocal microscope to attain the surface profile using CCD and image processing techniques", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73892U (17 June 2009); https://doi.org/10.1117/12.827471

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