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17 June 2009 Simulation and fabrication of white light confocal microscope to attain the surface profile using CCD and image processing techniques
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Abstract
An instrument to attain surface topography is White Light Confocal Microscope (WLCM).WLCM utilizes a spectrometer to analyze the scattering wavelength from the surface of a specimen. In this paper we used a CCD and some image processing techniques instead of spectrometer to determine the scattered wavelength. Both simulation (By Zemax Optical Design Software) and experiment have been performed. To reach the longitudinal chromatic aberration, two biconvex lenses with longitudinal chromatic aberration were used in the simulation and the experiment. Also, the lateral resolution is provided by a 40X microscope objective lens. The white light source of the experiment setup is a Xenon lamp and the used wavelength ranges from 420 nm to 630 nm. Comparison of the results showed an acceptable conformity between the simulation and the experiment. Finally, the topography of the surface was achieved.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. Behroodi, A. Mousavian, and H. Latifi "Simulation and fabrication of white light confocal microscope to attain the surface profile using CCD and image processing techniques", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73892U (17 June 2009); https://doi.org/10.1117/12.827471
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