17 June 2009 Weighted integral method in white-light interferometry: envelope estimation from fraction of interferogram
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Abstract
White-light scanning interferometry is a powerful technique for three-dimensional (3D) shape measurements of optical devices, industrial parts and microstructures. In order to obtain high performance out of this technique, many algorithms have been proposed such as phase-shifting, zero-crossing and Fourier-transform based methods. However, all of these algorithms require that the interferogram be sampled over a wide range. Unlike these conventional techniques, we here propose a weighted integral method that gives an estimate of the envelope peek position from only a fraction of the interferogram.
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Seichi Sato, Seichi Sato, Shigeru Ando, Shigeru Ando, } "Weighted integral method in white-light interferometry: envelope estimation from fraction of interferogram", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73892V (17 June 2009); doi: 10.1117/12.827498; https://doi.org/10.1117/12.827498
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