Interferometric characterization of mono- and polycrystalline CVD diamond

Maurizio Vannoni; Giuseppe Molesini; Silvio Sciortino; Stefano Lagomarsino; Paolo Olivero

doi:10.1117/12.827535

17 June 2009 Interferometric characterization of mono- and polycrystalline CVD diamond

Maurizio Vannoni; Giuseppe Molesini; Silvio Sciortino; Stefano Lagomarsino; Paolo Olivero

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Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 738931 (2009) https://doi.org/10.1117/12.827535
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

Mono and polycrystalline Chemical Vapor Deposited (CVD) diamond is a promising material for several advanced topics: microchips substrate, biological applications, UV and particle detection. Commercial CVD diamonds are available in small square size, commonly 3-5 millimeters side and 0.5-1.5 millimeters thickness. To improve diamond reliability for described applications, it is important to have a quality control on diamond samples, not only for electrical constants but also for optical characteristics and surface roughness. In this paper we present an optical characterization method based on interferometric instruments, to measure surface structure and internal homogeneity of mono ad polycrystalline commercial CVD diamonds, with measurement examples.

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Maurizio Vannoni, Maurizio Vannoni, Giuseppe Molesini, Giuseppe Molesini, Silvio Sciortino, Silvio Sciortino, Stefano Lagomarsino, Stefano Lagomarsino, Paolo Olivero, Paolo Olivero, } "Interferometric characterization of mono- and polycrystalline CVD diamond", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 738931 (17 June 2009); doi: 10.1117/12.827535; https://doi.org/10.1117/12.827535

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