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Analysis of the positioning error on lateral shearing surface reconstruction with a Fizeau interferometer
Numerical investigations of prospects, challenges, and limitations of non-imaging optical metrology of structured surfaces
Specular and diffuse scattering from random asperities of any profile using the rigorous method for x-rays and neutrons
Determination of phase and modulation transfer function (PTF and MTF) of a printer by the convolution of transmission function measurement
Diffraction microtomography with sample rotation: primary result on the influence of a missing apple core in the recorded frequency space
Prospects and limits of the Rayleigh Fourier approach for diffraction modelling in scatterometry and lithography