17 June 2009 Traceability of the F25 vision system for calibration of grated structures with submicron accuracyv
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Abstract
We have investigated the uncertainty sources that affect the traceability of dimensional measurements using the VIScan of the Zeiss F25 coordinate measuring machine (CMM). Our experimental results on line-width measurements are promising, having a repeatability below 120 nm and moreover they are reproducible for all light settings investigated. The comparison with the measurements performed on a facility used for line-scale calibrations provides very good agreement. At present we can report an uncertainty below 0.45 μm for line-width calibrations. This would be the first traceable F25 VIScan, and to our knowledge one of the first truly traceable vision systems for line-width calibrations.
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Ancuta I. Mares, Ancuta I. Mares, Rob H. Bergmans, Rob H. Bergmans, Gerard J. W. L Kotte, Gerard J. W. L Kotte, Rutger R. Tromp, Rutger R. Tromp, } "Traceability of the F25 vision system for calibration of grated structures with submicron accuracyv", Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 739004 (17 June 2009); doi: 10.1117/12.827545; https://doi.org/10.1117/12.827545
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