17 June 2009 Reduced basis method for fast and robust simulation of electromagnetic scattering problems
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Abstract
Numerical design inverse reconstruction and parameter estimation of optical systems usually involves the multiple solution of an e.g. geometrically parameterized system. Long computational times however can rule out many possible applications like inverse scatterometry. The reduced basis method allows to split up the solution process of an e.g. geometrically parameterized system into an expensive offline and a cheap online part. In the offline phase the reduced basis is computed selfadaptively by solving the underlying model several times. During the real-time application the reduced system is solved in the order of seconds even for 3D problems. Error estimators assure the reliability of the reduced basis solutions. In our contribution we explain general ideas of the reduced basis method and apply it to the simulation of light scattering from 2D and 3D parameterized photo masks. We compare computational times and accuracy of reduced basis and rigorous finite element simulations.
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Jan Pomplun, Jan Pomplun, Frank Schmidt, Frank Schmidt, } "Reduced basis method for fast and robust simulation of electromagnetic scattering problems", Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 73900I (17 June 2009); doi: 10.1117/12.827588; https://doi.org/10.1117/12.827588
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