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17 June 2009 Numerical investigations of prospects, challenges, and limitations of non-imaging optical metrology of structured surfaces
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Abstract
We investigate some prospects of scatterometric methods for quantitative dimensional metrology of periodic micro- and nanostructures like e. g. parameter sensitivity. Additionally we discuss some limitations with respect to numerical or metrological constrains of different scatterometric methods.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
B. Bodermann and M. Wurm "Numerical investigations of prospects, challenges, and limitations of non-imaging optical metrology of structured surfaces", Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 73900R (17 June 2009); https://doi.org/10.1117/12.830663
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