Roughness measurement methodology according to DIN 4768 using optical coherence tomography (OCT)

Marcello M. Amaral; Marcus P. Raele; José P. Caly; Ricardo E. Samad; Nilson D. Vieira Jr.; Anderson Z. Freitas

doi:10.1117/12.827748

17 June 2009 Roughness measurement methodology according to DIN 4768 using optical coherence tomography (OCT)

Marcello M. Amaral, Marcus P. Raele, José P. Caly, Ricardo E. Samad, Nilson D. Vieira Jr., Anderson Z. Freitas

Proceedings Volume 7390, Modeling Aspects in Optical Metrology II; 73900Z (2009) https://doi.org/10.1117/12.827748
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

Measure roughness in some sort of samples can present several problems when it is done in traditional way (with physical contact). For instance, soft samples will present at least two kinds of problem: (a) the value presented by the equipment not represents the sample roughness; (b) the equipment can perform serious damages to the sample. Using a commercial type OCT (Thorlabs Inc.) with 6μm axial resolution (in air) and 6μm lateral resolution, measurements of roughness standards with Ra nominal values of 0.8, 1.6, 3.2, 6.3, 12.5, 25.0 and 50.0 μm. A homemade software analysis the OCT images, and automatically calculates the Ra and Rz values. This procedure was performed to validate this methodology comparing the OCT and roughness standards values.

Citation Download Citation

Marcello M. Amaral, Marcus P. Raele, José P. Caly, Ricardo E. Samad, Nilson D. Vieira Jr., and Anderson Z. Freitas "Roughness measurement methodology according to DIN 4768 using optical coherence tomography (OCT)", Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 73900Z (17 June 2009); https://doi.org/10.1117/12.827748

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