3 September 2009 Plasmonic gold structures with individually designed geometries
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Proceedings Volume 7394, Plasmonics: Metallic Nanostructures and Their Optical Properties VII; 73941Q (2009); doi: 10.1117/12.826202
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States
Abstract
Individual small gold structures of different sizes and shapes are fabricated on planar substrates for subsequent characterization of their optical properties. In the process, a combination of thin-film metallization, electron beam lithography and ion milling is employed, where electron beam structured hydrogen silsesquioxane is used as an etch mask for the underlying gold layer. Gold cones, vertical rods, cups and flat disks can be prepared with a typical height of about 100 nm. Their optical properties are investigated by confocal optical microscopy using a parabolic mirror for both laser focusing and signal collection. As an example, the photoluminescence signal collected from an array of gold cones is shown.
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Monika Fleischer, Kai Braun, Dai Zhang, Sebastian Jäger, Alfred J. Meixner, Dieter P. Kern, "Plasmonic gold structures with individually designed geometries", Proc. SPIE 7394, Plasmonics: Metallic Nanostructures and Their Optical Properties VII, 73941Q (3 September 2009); doi: 10.1117/12.826202; https://doi.org/10.1117/12.826202
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KEYWORDS
Gold

Etching

Photomasks

Ions

Electron beam lithography

Optical properties

Plasmonics

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