20 August 2009 Effect of solvent on morphological properties of TiOx thin film
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Abstract
Sol-gel preparation of amorphous titanium oxide (TiOx) thin films with distinct morphological properties on the hydrophobic substrate was obtained by solution spin coating method. The TiOx thin films were deposited by three precursors using 2-methoxyethanol (2MOE), isopropanol (IPA) and mixture of 2MOE and hexane as solvents. We demonstrate evidence that the morphology of TiOx thin film is strongly related to the employment of dissimilar solvent. Among these three solvents, TiOx film obtained from 2MOE/hexane mixed solvent is a superior choice for the preparation of TiOx thin film on the hydrophobic substrate because of its smooth surface morphology.
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Meng-Yueh Liu, Chih-Hua Chang, Chin-Hsiang Chang, Jing-Shun Huang, Chia-Shin Chao, Yu-Hong Lin, Wen-Han Lin, Ching-Fuh Lin, "Effect of solvent on morphological properties of TiOx thin film", Proc. SPIE 7396, Physical Chemistry of Interfaces and Nanomaterials VIII, 73960U (20 August 2009); doi: 10.1117/12.825421; https://doi.org/10.1117/12.825421
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