A hybrid CMOS/Microfluidic microsystem is presented. The microsystem integrates a soft polymer microfluidic
network with a 64x128 pixel imager fabricated in low-cost standard 0.35 micron CMOS technology. The multiple
microfluidic channels facilitate in-situ photochemical reactions of analytes and their detection directly on the
surface of the CMOS photosensor array. The promixity between the analyte and the photosensor enhances
the microsystem sensitivity, thus requiring only microliter volumes of the sample. Circuit techniques such as
pixel binning and a two transistor reset path technique are employed to improve the imager sensitivity. The
integrated microsystem is validated in on-chip chemiluminescence detection of luminol for the two microfluidic
network prototypes designed.