20 August 2009 Environment for thin-film manufacturing process development for product engineering of micro and nano devices
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Abstract
Product engineering of micro and nano technology (MNT) devices differs substantially from product engineering in more traditional industries. The general development approach is mostly bottom up, as it centers around the available fabrication techniques and is characterised by application specific fabrication flows, i.e. fabrication processes depending on the later product. In the first part of this paper we introduce a comprehensive customer-oriented product engineering methodology for MNT products that regards the customer as the driving force behind new product developments. The MNT product engineering process is analyzed with regard to application-specific procedures and interfaces. An environment for the development of MNT manufacturing processes has been identified as a technical foundation for the methodology and will be described in the second part of this paper.
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Dirk Ortloff, Dirk Ortloff, Kai Hahn, Kai Hahn, Jens Popp, Jens Popp, Thilo Schmidt, Thilo Schmidt, Rainer Brück, Rainer Brück, "Environment for thin-film manufacturing process development for product engineering of micro and nano devices", Proc. SPIE 7402, Nanoengineering: Fabrication, Properties, Optics, and Devices VI, 74020N (20 August 2009); doi: 10.1117/12.825606; https://doi.org/10.1117/12.825606
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