Nanoscale dimensional metrology in Russia

V. P. Gavrilenko; Yu. A. Novikov; A. V. Rakov; P. A. Todua

doi:10.1117/12.826164

21 August 2009 Nanoscale dimensional metrology in Russia

V. P. Gavrilenko, Yu. A. Novikov, A. V. Rakov, P. A. Todua

Proceedings Volume 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III; 740504 (2009) https://doi.org/10.1117/12.826164
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States

Abstract

We discuss the formation of the system of nanoscale dimensional measurements in Russia. The traceability of the nanoscale measurements to the primary standard of the unit of length (the meter) is shown. Russian state standards that provide the standardization basis for such dimensional measurements are discussed.

Citation Download Citation

V. P. Gavrilenko, Yu. A. Novikov, A. V. Rakov, and P. A. Todua "Nanoscale dimensional metrology in Russia", Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 740504 (21 August 2009); https://doi.org/10.1117/12.826164

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