21 August 2009 Interferometric imaging ellipsometry: fundamental study
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Abstract
A new type of spectroscopic ellipsometry is proposed for imaging optical properties of non-uniform thin films. Unlike conventional spectroscopic ellipsometers, the ellipsometer is neither based on a monochromator nor a spectrometer. By using broad-band light source and white-light interference technique, the ellipsometry system efficiently illuminates the sample and enables us to detect reflected light with a CCD or CMOS image sensor. Therefore fast imaging ellipsometry is realized over wide spectral range. In this study, we built simple imaging ellipsometer based on P-S-A (polarizer-sample-analyzer) configuration and show fundamental experimental results.
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Seichi Sato, Seichi Sato, Shigeru Ando, Shigeru Ando, } "Interferometric imaging ellipsometry: fundamental study", Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 74050F (21 August 2009); doi: 10.1117/12.825198; https://doi.org/10.1117/12.825198
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