21 August 2009 Spectral effects of AFM tip geometry
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It is known that tactile measurement systems like AFM, besides their resolution limit in spatial frequency, introduce distortions in the measured surface functions. Usually the distortion process is described by morphological operations, which are also used for reconstruction approaches. These operations do not deliver analytical information on the spectral consequences of the distortion process. Since the measurement and signal chain are time dependent systems and the signal processing is often based on time resp. spatial frequency analysis, such analytical estimations are highly desirable. The paper describes a method to characterize the distortion process in the spectral domain, leading to a spectral description of the resulting signal. The presented approach is neither based on morphological image processing nor convolution and can be utilized to determine the obtainable quality of AFM measurements and the limits of surface reconstruction.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Cornelius Hahlweg, Cornelius Hahlweg, Hendrik Rothe, Hendrik Rothe, } "Spectral effects of AFM tip geometry", Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 74050I (21 August 2009); doi: 10.1117/12.826835; https://doi.org/10.1117/12.826835


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