Non-linear distortions caused by AFM-tip geometry and limitations of reconstruction on discrete data

Cornelius Hahlweg; Hendrik Rothe

doi:10.1117/12.826855

21 August 2009 Non-linear distortions caused by AFM-tip geometry and limitations of reconstruction on discrete data

Cornelius Hahlweg, Hendrik Rothe

Proceedings Volume 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III; 74050K (2009) https://doi.org/10.1117/12.826855
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States

Abstract

In tactile measurement systems like AFM it is obvious that a certain tip shape will result in a remarkable blurring of edges and also a distortion of smooth surface functions. In previous papers the highly non-linear nature of the blurring process and the resulting distortions could be shown using expansions in frequency domain. Also limitations for the reconstruction of continuous sinusoidal surface functions were derived. In the first line the current paper delivers an extended mathematical approach describing the distortion process by recursive application of a phase-modulating factor, which is applicable on arbitrary functions and also on discrete data. Second, the approach is used to formulate the inverse problem and so delivers a possible reconstruction method. The reconstruction limit for the tip radius is extended.

Citation Download Citation

Cornelius Hahlweg and Hendrik Rothe "Non-linear distortions caused by AFM-tip geometry and limitations of reconstruction on discrete data", Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 74050K (21 August 2009); https://doi.org/10.1117/12.826855

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