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21 August 2009 Non-linear distortions caused by AFM-tip geometry and limitations of reconstruction on discrete data
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Abstract
In tactile measurement systems like AFM it is obvious that a certain tip shape will result in a remarkable blurring of edges and also a distortion of smooth surface functions. In previous papers the highly non-linear nature of the blurring process and the resulting distortions could be shown using expansions in frequency domain. Also limitations for the reconstruction of continuous sinusoidal surface functions were derived. In the first line the current paper delivers an extended mathematical approach describing the distortion process by recursive application of a phase-modulating factor, which is applicable on arbitrary functions and also on discrete data. Second, the approach is used to formulate the inverse problem and so delivers a possible reconstruction method. The reconstruction limit for the tip radius is extended.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Cornelius Hahlweg and Hendrik Rothe "Non-linear distortions caused by AFM-tip geometry and limitations of reconstruction on discrete data", Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 74050K (21 August 2009); https://doi.org/10.1117/12.826855
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