21 August 2009 Improvements to spectral spot-scanning technique for accurate and efficient data acquisition
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An improved and optimized spectral spot-scanning system for visible focal plane array (FPA) sub-micron pixel photoresponse testing is presented. This updated configuration includes: (1) additional diagnostic analysis tools which more completely characterize the operation of the system; (2) a confocal microscope fitted into the optical system to aid in more precise determination of spot focusing on the imager; (3) a post-acquisition transformation to imager pixel response data to reduce overall data acquisition time. Wavelength-dependent pixel response data is presented to demonstrate the repeatability of this setup as well as to quantify the impact of random and systematic experimental errors.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jonathan D. Bray, Kevin M. Gaab, Bruce M. Lambert, Terrence S. Lomheim, "Improvements to spectral spot-scanning technique for accurate and efficient data acquisition", Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 74050L (21 August 2009); doi: 10.1117/12.828292; https://doi.org/10.1117/12.828292


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