Improvements to spectral spot-scanning technique for accurate and efficient data acquisition

Jonathan D. Bray; Kevin M. Gaab; Bruce M. Lambert; Terrence S. Lomheim

doi:10.1117/12.828292

21 August 2009 Improvements to spectral spot-scanning technique for accurate and efficient data acquisition

Jonathan D. Bray; Kevin M. Gaab; Bruce M. Lambert; Terrence S. Lomheim

Author Affiliations +

Proceedings Volume 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III; 74050L (2009) https://doi.org/10.1117/12.828292
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States

Abstract

An improved and optimized spectral spot-scanning system for visible focal plane array (FPA) sub-micron pixel photoresponse testing is presented. This updated configuration includes: (1) additional diagnostic analysis tools which more completely characterize the operation of the system; (2) a confocal microscope fitted into the optical system to aid in more precise determination of spot focusing on the imager; (3) a post-acquisition transformation to imager pixel response data to reduce overall data acquisition time. Wavelength-dependent pixel response data is presented to demonstrate the repeatability of this setup as well as to quantify the impact of random and systematic experimental errors.

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Jonathan D. Bray, Jonathan D. Bray, Kevin M. Gaab, Kevin M. Gaab, Bruce M. Lambert, Bruce M. Lambert, Terrence S. Lomheim, Terrence S. Lomheim, } "Improvements to spectral spot-scanning technique for accurate and efficient data acquisition", Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 74050L (21 August 2009); doi: 10.1117/12.828292; https://doi.org/10.1117/12.828292

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