21 August 2009 Improvements to spectral spot-scanning technique for accurate and efficient data acquisition
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Proceedings Volume 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III; 74050L (2009); doi: 10.1117/12.828292
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States
Abstract
An improved and optimized spectral spot-scanning system for visible focal plane array (FPA) sub-micron pixel photoresponse testing is presented. This updated configuration includes: (1) additional diagnostic analysis tools which more completely characterize the operation of the system; (2) a confocal microscope fitted into the optical system to aid in more precise determination of spot focusing on the imager; (3) a post-acquisition transformation to imager pixel response data to reduce overall data acquisition time. Wavelength-dependent pixel response data is presented to demonstrate the repeatability of this setup as well as to quantify the impact of random and systematic experimental errors.
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Jonathan D. Bray, Kevin M. Gaab, Bruce M. Lambert, Terrence S. Lomheim, "Improvements to spectral spot-scanning technique for accurate and efficient data acquisition", Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 74050L (21 August 2009); doi: 10.1117/12.828292; https://doi.org/10.1117/12.828292
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KEYWORDS
Modulation transfer functions

Imaging systems

Point spread functions

Data acquisition

Microscopes

Objectives

Spatial frequencies

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