Improvements to spectral spot-scanning technique for accurate and efficient data acquisition

Jonathan D. Bray; Kevin M. Gaab; Bruce M. Lambert; Terrence S. Lomheim

doi:10.1117/12.828292

21 August 2009 Improvements to spectral spot-scanning technique for accurate and efficient data acquisition

Jonathan D. Bray; Kevin M. Gaab; Bruce M. Lambert; Terrence S. Lomheim

Author Affiliations +

Proceedings Volume 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III; 74050L (2009) https://doi.org/10.1117/12.828292
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States

Abstract

An improved and optimized spectral spot-scanning system for visible focal plane array (FPA) sub-micron pixel photoresponse testing is presented. This updated configuration includes: (1) additional diagnostic analysis tools which more completely characterize the operation of the system; (2) a confocal microscope fitted into the optical system to aid in more precise determination of spot focusing on the imager; (3) a post-acquisition transformation to imager pixel response data to reduce overall data acquisition time. Wavelength-dependent pixel response data is presented to demonstrate the repeatability of this setup as well as to quantify the impact of random and systematic experimental errors.

Citation Download Citation

Jonathan D. Bray, Kevin M. Gaab, Bruce M. Lambert, Terrence S. Lomheim, "Improvements to spectral spot-scanning technique for accurate and efficient data acquisition", Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 74050L (21 August 2009); doi: 10.1117/12.828292; https://doi.org/10.1117/12.828292

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