21 August 2009 Fabrication of microlens arrays on a glass substrate by roll-to-roll process with PDMS mold
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Abstract
This paper presents a roll-to-roll method to fabricate microlens arrays on a glass substrate by using a cost-effective PDMS (Polydimethylsiloxane) mold. We fabricated microlens arrays mold, which was made by photoresist(AZ4620), on the silicon substrate by thermal reflow process, and transferred the pattern to PDMS film. Roll-to-roll system is a standard printing process whose roller is made of acrylic cylinder surrounded with the PDMS mold. UV resin was chosen to be the material to make microlens in rolling process with UV light curing. We investigated the quality of microlens arrays by changing the parameters, such as embossing pressure and rolling speed, to ensure good quality of microlens arrays.
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Chia-Nying Hu and Guo-Dung John Su "Fabrication of microlens arrays on a glass substrate by roll-to-roll process with PDMS mold", Proc. SPIE 7425, Optical Materials and Structures Technologies IV, 74250Z (21 August 2009); doi: 10.1117/12.826058; https://doi.org/10.1117/12.826058
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