21 August 2009 Swing arm optical CMM for aspherics
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A profilometer for in situ measurement of the topography of aspheric mirrors called the Swing arm Optical CMM (SOC) was built, and has been used for measuring the figure of 1.4 m convex aspheric mirrors with a performance rivaling full aperture interferometric tests. Errors in the SOC that have odd symmetry are self-calibrated due to the test geometry. Even errors are calibrated against a full aperture interferometric test.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peng Su, Chang Jin Oh, Robert E. Parks, James H. Burge, "Swing arm optical CMM for aspherics", Proc. SPIE 7426, Optical Manufacturing and Testing VIII, 74260J (21 August 2009); doi: 10.1117/12.828493; https://doi.org/10.1117/12.828493

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