21 August 2009 Swing arm optical CMM for aspherics
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Abstract
A profilometer for in situ measurement of the topography of aspheric mirrors called the Swing arm Optical CMM (SOC) was built, and has been used for measuring the figure of 1.4 m convex aspheric mirrors with a performance rivaling full aperture interferometric tests. Errors in the SOC that have odd symmetry are self-calibrated due to the test geometry. Even errors are calibrated against a full aperture interferometric test.
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Peng Su, Chang Jin Oh, Robert E. Parks, James H. Burge, "Swing arm optical CMM for aspherics", Proc. SPIE 7426, Optical Manufacturing and Testing VIII, 74260J (21 August 2009); doi: 10.1117/12.828493; https://doi.org/10.1117/12.828493
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