22 August 2009 High-speed and precision auto-focusing system for direct laser lithography
Author Affiliations +
Proceedings Volume 7426, Optical Manufacturing and Testing VIII; 742610 (2009); doi: 10.1117/12.825191
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States
The auto-focusing is one of the important parts in the automated vision inspection or measurement using optical microscopes. Moreover, laser micromachining or laser lithography requires a high speed and precision auto-focusing. In this paper, we propose and realize an auto-focusing system using two cylindrical lenses, which is the enhanced version of the previous astigmatism method. It shows very good performances, especially very high speed and the largest defocusing range in comparison with the previous astigmatic methods. The performance of our auto-focusing system was evaluated by tracing the linear stage whose position was monitored by a commercial laser interferometer.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dong-Ik Kim, Hyug-Gyo Rhee, Jae-Bong Song, Yun-Woo Lee, "High-speed and precision auto-focusing system for direct laser lithography", Proc. SPIE 7426, Optical Manufacturing and Testing VIII, 742610 (22 August 2009); doi: 10.1117/12.825191; https://doi.org/10.1117/12.825191


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