21 August 2009 High-speed and precision auto-focusing system for direct laser lithography
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Abstract
The auto-focusing is one of the important parts in the automated vision inspection or measurement using optical microscopes. Moreover, laser micromachining or laser lithography requires a high speed and precision auto-focusing. In this paper, we propose and realize an auto-focusing system using two cylindrical lenses, which is the enhanced version of the previous astigmatism method. It shows very good performances, especially very high speed and the largest defocusing range in comparison with the previous astigmatic methods. The performance of our auto-focusing system was evaluated by tracing the linear stage whose position was monitored by a commercial laser interferometer.
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Dong-Ik Kim, Hyug-Gyo Rhee, Jae-Bong Song, Yun-Woo Lee, "High-speed and precision auto-focusing system for direct laser lithography", Proc. SPIE 7426, Optical Manufacturing and Testing VIII, 742610 (21 August 2009); doi: 10.1117/12.825191; https://doi.org/10.1117/12.825191
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