Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping

J. Masson; A. Bich; W. Noell; R. Voelkel; K. J. Weible; N. F. De Rooij

doi:10.1117/12.827663

21 August 2009 Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping

J. Masson, A. Bich, W. Noell, R. Voelkel, K. J. Weible, N. F. De Rooij

Proceedings Volume 7430, Laser Beam Shaping X; 74300H (2009) https://doi.org/10.1117/12.827663
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

We present a dynamic laser beam shaper based on MEMS technology. We show a prototype of a dynamic diffuser made of single crystal silicon. A linearly deformable silicon micromembrane is used to diffuse a laser beam in one dimension. Resonance frequencies of the membrane can range from 1 kHz to 100 kHz. Diffusing angle can be tuned by adjusting the driving voltage. We measured a diffusing angle of 0.16° for an actuation voltage of 20 V.

Citation Download Citation

J. Masson, A. Bich, W. Noell, R. Voelkel, K. J. Weible, and N. F. De Rooij "Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping", Proc. SPIE 7430, Laser Beam Shaping X, 74300H (21 August 2009); https://doi.org/10.1117/12.827663

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