21 August 2009 Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping
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Abstract
We present a dynamic laser beam shaper based on MEMS technology. We show a prototype of a dynamic diffuser made of single crystal silicon. A linearly deformable silicon micromembrane is used to diffuse a laser beam in one dimension. Resonance frequencies of the membrane can range from 1 kHz to 100 kHz. Diffusing angle can be tuned by adjusting the driving voltage. We measured a diffusing angle of 0.16° for an actuation voltage of 20 V.
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J. Masson, A. Bich, W. Noell, R. Voelkel, K. J. Weible, N. F. De Rooij, "Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping", Proc. SPIE 7430, Laser Beam Shaping X, 74300H (21 August 2009); doi: 10.1117/12.827663; https://doi.org/10.1117/12.827663
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