10 September 2009 Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer
Author Affiliations +
Abstract
A collimated line beam is incident at an oblique incident angle of 0.61 rad into an inner surface of a hydrodynamic bearing whose inner diameter and length are 3 mm and 3.5 mm, respectively. Lights reflected in specified directions from the inner surface are selected to obtain an optical field whose phase distribution is proportional to the inner surface profile. This optical field interferes with a reference optical field in a two-wavelength interferometer using a tunable external cavity laser diode. Shapes of grooves with depth of about 5 μm and width of about 0.15 mm formed on the inner surface can be measured with an error less than 0.3 μm.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Osami Sasaki, Osami Sasaki, Ryota Yamamura, Ryota Yamamura, Kazushi Yokoyama, Kazushi Yokoyama, Takamasa Suzuki, Takamasa Suzuki, } "Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer", Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 74320J (10 September 2009); doi: 10.1117/12.827352; https://doi.org/10.1117/12.827352
PROCEEDINGS
5 PAGES


SHARE
Back to Top