10 September 2009 Three-dimensional profilometry system incorporating a MEMS scanner
Author Affiliations +
To improve difficulties inherent to the conventional three-dimensional profiling system based on pattern projection method, we propose incorporating a recent digital device such as a MEMS scanner into projection optics. Due to this revision, first of all, a compact measurement system is easily attainable, and, when we adjust the scanner to produce the original pattern with non-equal periodical structure, the projected pattern is so formed as to be equal in period on the reference plane. In addition, the pattern becomes sharp over the whole field of measurement when the Scheimpflug condition is satisfied in optical arrangement. This brings easier analysis of the captured pattern and attains the threedimensional profilometry system with deeper range of focus, wider field of measurement and higher accuracy of measurement.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Toru Yoshizawa, Toru Yoshizawa, Toshitaka Wakayama, Toshitaka Wakayama, } "Three-dimensional profilometry system incorporating a MEMS scanner", Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 74320P (10 September 2009); doi: 10.1117/12.825980; https://doi.org/10.1117/12.825980


Advanced optical 3D scanners using DMD technology
Proceedings of SPIE (February 20 2017)
A flexible 3D laser scanning system using a robotic arm
Proceedings of SPIE (June 26 2017)
A palm top camera for 3D profilometry incorporating a MEMS...
Proceedings of SPIE (November 11 2010)
Review of 20 years of range sensor development
Proceedings of SPIE (January 10 2003)
Compact camera system for 3D profile measurement
Proceedings of SPIE (November 24 2009)

Back to Top