10 September 2009 Chromatic confocal spectral interferometry for technical surface characterization
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Abstract
Chromatic confocal spectral interferometry (CCSI) is a hybrid method for fast topography measurement, which combines the advantages of the interferometric gain and accuracy with the robustness of confocal microscopy. The CCSI-principle provides a single shot measurement of depth while offering a higher lateral resolution than commonly used spectral interferometers. This contribution is focused on the modeling and simulation of a CCSI-sensor for measuring rough surfaces, based on sequential and non-sequential ray-tracing. With the simulation, the influence of surface roughness, surface reflectivity, and surface contamination on reliability of the sensor can be estimated.
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W. Lyda, W. Lyda, D. Fleischle, D. Fleischle, T. Haist, T. Haist, W. Osten, W. Osten, "Chromatic confocal spectral interferometry for technical surface characterization", Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 74320Z (10 September 2009); doi: 10.1117/12.826902; https://doi.org/10.1117/12.826902
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