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31 August 2009 Depth-graded Co/C multilayers prepared by reactive sputtering
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Abstract
We have used reactive sputtering with nitrogen to deposit both periodic and depth-graded Co/C X-ray multilayers intended for use at grazing incidence for astronomical applications. In comparison to Co/C films deposited nonreactively, reactively-sputtered films show lower stress and lower roughness. Consequently we have been able to fabricate Co/C multilayers that have much smaller periods relative to what can be achieved using non-reactive sputtering. We have thus far produced several prototype Co/C multilayers, including a depth-graded film containing 500 bilayers for use below 10 keV, and a depth-graded film containing 1100 bilayers for use up to 100 keV. Both of these films show excellent X-ray performance, low film stress, and excellent temporal stability.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jeffrey A. Bellotti and David L. Windt "Depth-graded Co/C multilayers prepared by reactive sputtering", Proc. SPIE 7437, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IV, 743715 (31 August 2009); https://doi.org/10.1117/12.824628
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