Progress on the development of active micro-structured optical arrays for x-ray optics

Daniel Rodriguez Sanmartin; Dou Zhang; Tim Button; Carolyn Atkins; Peter Doel; Hongchang Wang; David Brooks; Charlotte Feldman; Richard Willingale; Alan Michette; Slawka Pfauntsch; Shahin Sahraei; Matthew Shand; Ady James; Camelia Dunare; Tom Stevenson; William Parkes; Andy Smith

doi:10.1117/12.826096

4 September 2009 Progress on the development of active micro-structured optical arrays for x-ray optics

Daniel Rodriguez Sanmartin, Dou Zhang, Tim Button, Carolyn Atkins, Peter Doel, Hongchang Wang, David Brooks, Charlotte Feldman, Richard Willingale, Alan Michette, Slawka Pfauntsch, Shahin Sahraei, Matthew Shand, Ady James, Camelia Dunare, Tom Stevenson, William Parkes, Andy Smith

Author Affiliations +

Proceedings Volume 7448, Advances in X-Ray/EUV Optics and Components IV; 744808 (2009) https://doi.org/10.1117/12.826096
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

The Smart X-Ray Optics (SXO) project comprises a U.K.-based consortium developing active/adaptive micro-structured optical arrays (MOAs). These devices are designed to focus X-rays using grazing incidence reflection through consecutive aligned arrays of microscopic channels etched in silicon. The silicon channels have been produced both by dry and wet etching, the latter providing smoother channel walls. Adaptability is achieved using piezoelectric actuators, which bend the device and therefore change its focal distance. We aim to achieve a 5 cm radius of curvature which can provide a suitable focal length using a tandem pair MOA configuration. Finite Element Analysis (FEA) modelling has been carried out for the optimization of the MOA device design, consider different types of actuators (unimorph, bimorph and active fibre composites), and different Si/piezoelectric absolute and relative thicknesses. Prototype devices have been manufactured using a Viscous Plastic Processing Process for the piezoelectric actuators and dry etched silicon channels, bonded together using a low shrinkage adhesive. Characterisation techniques have been developed in order to evaluate the device performance in terms of the bending of the MOA channels produced by the actuators. This paper evaluates the progress to date on the actuation of the MOAs, comparing FEA modelling with the results obtained for different prototype structures.

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Daniel Rodriguez Sanmartin, Dou Zhang, Tim Button, Carolyn Atkins, Peter Doel, Hongchang Wang, David Brooks, Charlotte Feldman, Richard Willingale, Alan Michette, Slawka Pfauntsch, Shahin Sahraei, Matthew Shand, Ady James, Camelia Dunare, Tom Stevenson, William Parkes, and Andy Smith "Progress on the development of active micro-structured optical arrays for x-ray optics", Proc. SPIE 7448, Advances in X-Ray/EUV Optics and Components IV, 744808 (4 September 2009); https://doi.org/10.1117/12.826096

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