1D-KBA microscope using double-periodic multilayer

Baozhong Mu; Zhanshan Wang; Shengzhen Yi; Jingtao Zhu; Xin Wang; Li Jiang; Qiushi Huang; Yuhong Bai

doi:10.1117/12.825767

8 September 2009 1D-KBA microscope using double-periodic multilayer

Baozhong Mu; Zhanshan Wang; Shengzhen Yi; Jingtao Zhu; Xin Wang; Li Jiang; Qiushi Huang; Yuhong Bai

Author Affiliations +

Proceedings Volume 7448, Advances in X-Ray/EUV Optics and Components IV; 74480K (2009) https://doi.org/10.1117/12.825767
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

To study the action of shock wave in CH target, one-dimensional grazing incidence KBA microscope for 4.75keV energy was set up. Because of strong absorption in air, 4.75keV energy microscope can just work in vacuum. Accordingly, the alignment and assemblage will be very complicated and difficult. A special multilayer method, using double periodic multilayer, was proposed to solve this problem. This multilayer has high reflectivity not only for 4.75keV x-rays but also for 8keV x-rays at the same grazing incidence angle. It means 1D-KBA microscope has the same light trace for different working energies. Therefore, we can implement the alignment and assembly of 4.75keV system by the help of 8keV x-rays. Because 8keV x-rays is very easy produced by x-ray tube and has strong transmittability in air, the alignment and assemblage process became relatively easy. By now, we have finished the alignment experiment at 8keV and obtained imaging results. The performance is about 2-3μm resolution in 250μm field of view. It is coincide with the calculation.

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Baozhong Mu, Baozhong Mu, Zhanshan Wang, Zhanshan Wang, Shengzhen Yi, Shengzhen Yi, Jingtao Zhu, Jingtao Zhu, Xin Wang, Xin Wang, Li Jiang, Li Jiang, Qiushi Huang, Qiushi Huang, Yuhong Bai, Yuhong Bai, } "1D-KBA microscope using double-periodic multilayer", Proc. SPIE 7448, Advances in X-Ray/EUV Optics and Components IV, 74480K (8 September 2009); doi: 10.1117/12.825767; https://doi.org/10.1117/12.825767

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