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8 September 2009 Development of a high-precision slit for x-ray beamline at SPring-8
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A high-precision slit for monochromatic x-rays has been developed as one of the standardized components in the undulator beamline at SPring-8. Advanced experiments such as x-ray micro-beam diffraction and x-ray scanning microscope using nano-beam require small, variable and accurate apertures. The newly developed slit has an aperture size ranging from 1 μm × 1 μm to 20 mm × 20 mm with a resolution of 0.5 μm in full step. Each blade is independently driven through bellows mounted on both sides of the vacuum chamber. A set of bellows prevents displacement of the blade by evacuation. Using this slit, we could improve the displacement from 20 μm to 1 μm. The positioning accuracy of the slit is 0.5 μm. The slits have been installed in the three beamlines at SPring-8.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Takeuchi, M. Tanaka, T. Miura, Y. Senba, Y. Shimada, H. Tajiri, O. Sakata, M. Sato, T. Koganezawa, K. Uesugi, H. Ohashi, and S. Goto "Development of a high-precision slit for x-ray beamline at SPring-8", Proc. SPIE 7448, Advances in X-Ray/EUV Optics and Components IV, 74480Y (8 September 2009);

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