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28 September 2009 Tabletop soft x-ray lithography
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Abstract
A compact capillary discharge table top soft X ray laser was used for a table top photolithography tool using different approaches: holographic printing, interferometric lithography and coherent Talbot self imaging. Large areas, of the order of millimeter square, with periodic and arbitrary patterns were printed in a photoresist in short exposure times. The proof of principle of the lithographic technique achieved the expected ~100 nm resolution.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. C. Marconi, P. W. Wachulak, L. Urbanski, Artak Isoyan, Fan Jiang, Yang Chun Cheng, J. J. Rocca, C. S. Menoni, and F. Cerrina "Tabletop soft x-ray lithography", Proc. SPIE 7451, Soft X-Ray Lasers and Applications VIII, 74510J (28 September 2009); https://doi.org/10.1117/12.825509
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