28 September 2009 Wave field transformation at coherent imaging of a tilted reflection mask
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Abstract
The coherent beam wave field transformation is considered in the case of slanting illumination of a reflection mask. The parabolic wave equation is used to find the resulting field evolution in free space and after transmission by an ideal lens. Possible applications are lensless imaging, coherent X-ray diffraction imaging (CXDI), X-ray optics and X-ray laser based lithography and reflection microscopy, and high resolution X-ray topography.
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Igor A. Artyukov, Igor A. Artyukov, Alexei V. Popov, Alexei V. Popov, Alexander V. Vinogradov, Alexander V. Vinogradov, } "Wave field transformation at coherent imaging of a tilted reflection mask", Proc. SPIE 7451, Soft X-Ray Lasers and Applications VIII, 745114 (28 September 2009); doi: 10.1117/12.825929; https://doi.org/10.1117/12.825929
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