Assessment of surface roughness by use of soft x-ray scattering

Yan-li Meng; Yong-gang Wang; Shu-yan Chen; Bo Chen

doi:10.1117/12.826000

28 September 2009 Assessment of surface roughness by use of soft x-ray scattering

Yan-li Meng, Yong-gang Wang, Shu-yan Chen, Bo Chen

Proceedings Volume 7451, Soft X-Ray Lasers and Applications VIII; 745116 (2009) https://doi.org/10.1117/12.826000
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

A soft x-ray reflectometer with laser produced plasma source has been designed, which can work from wavelength 8nm to 30 nm and has high performance. Using the soft x-ray reflectometer above, the scattering light distribution of silicon and zerodur mirrors which have super-smooth surfaces could be measured at different incidence angle and different wavelength. The measurement when the incidence angle is 2 degree and the wavelength is 11nm has been given in this paper. A surface scattering theory of soft x-ray grazing incidence optics based on linear system theory and an inverse scattering mathematical model is introduced. The vector scattering theory of soft x-ray scattering also is stated in detail. The scattering data are analyzed by both the methods above respectively to give information about the surface profiles. On the other hand, both the two samples are measured by WYKO surface profiler, and the surface roughness of the silicon and zerodur mirror is 1.3 nm and 1.5nm respectively. The calculated results are in quantitative agreement with those measured by WYKO surface profiler, which indicates that soft x-ray scattering is a very useful tool for the evaluation of highly polished surfaces. But there still some difference among the results of different theory and WYKO, and the possible reasons of such difference have been discussed in detail.

Citation Download Citation

Yan-li Meng, Yong-gang Wang, Shu-yan Chen, and Bo Chen "Assessment of surface roughness by use of soft x-ray scattering", Proc. SPIE 7451, Soft X-Ray Lasers and Applications VIII, 745116 (28 September 2009); https://doi.org/10.1117/12.826000

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