17 August 2009 Smart hyperspectral imaging detection based on electrically tunable liquid-crystal Fabry-Perot microstructure array
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Abstract
A smart spectral imaging detection method based on the integration of electrically tunable liquid-crystal(LC) Fabry-Perot(FP) microstructure array is proposed. It has very broad application in many fields with advantages of low cost, highly compact integration and working without mechanical part. The device can get hundreds of spectral bands simultaneously in one frame of picture in theory. This paper proposes the structure of smart spectral imaging array device, and analyses some key issues of liquid crystal Fabry-Perot structures for imaging application and calibration. Prototypes of 4 × 4 LC-FP array with the cavity thickness ranging from 4 to 20 μm for the working wavelength in the range of 800~900nm, are made by lithography and wet etching. Test is carried out and analysed.
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Kan Liu, Kan Liu, Dehua Li, Dehua Li, Hui Li, Hui Li, Xinyu Zhang, Xinyu Zhang, Tianxu Zhang, Tianxu Zhang, } "Smart hyperspectral imaging detection based on electrically tunable liquid-crystal Fabry-Perot microstructure array", Proc. SPIE 7457, Imaging Spectrometry XIV, 74570U (17 August 2009); doi: 10.1117/12.825575; https://doi.org/10.1117/12.825575
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