11 August 2009 The Iris AO S163-X, a 489 actuator, 163-piston/tip/tilt-segment MEMS DM
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Iris AO has been developing microelectromechanical systems (MEMS) based deformable mirrors (DM) for a number of years. This paper presents a review of the basic segmented DM design and shows test results of a 111-actuator, 37- piston/tip/tilt (PTT) segment DM. A 489-actuator 163-PTT-segment design is described as well as progress towards the fabrication of the device. A view to the future is shown by describing path-finding research towards 3000-actuator, 1000- PTT-segment DMs.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael A. Helmbrecht, Min He, Carl J. Kempf, Patrick Rhodes, "The Iris AO S163-X, a 489 actuator, 163-piston/tip/tilt-segment MEMS DM", Proc. SPIE 7466, Advanced Wavefront Control: Methods, Devices, and Applications VII, 74660E (11 August 2009); doi: 10.1117/12.828384; https://doi.org/10.1117/12.828384


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