12 August 2009 The Iris AO S163-X, a 489 actuator, 163-piston/tip/tilt-segment MEMS DM
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Proceedings Volume 7466, Advanced Wavefront Control: Methods, Devices, and Applications VII; 74660E (2009); doi: 10.1117/12.828384
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States
Abstract
Iris AO has been developing microelectromechanical systems (MEMS) based deformable mirrors (DM) for a number of years. This paper presents a review of the basic segmented DM design and shows test results of a 111-actuator, 37- piston/tip/tilt (PTT) segment DM. A 489-actuator 163-PTT-segment design is described as well as progress towards the fabrication of the device. A view to the future is shown by describing path-finding research towards 3000-actuator, 1000- PTT-segment DMs.
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Michael A. Helmbrecht, Min He, Carl J. Kempf, Patrick Rhodes, "The Iris AO S163-X, a 489 actuator, 163-piston/tip/tilt-segment MEMS DM", Proc. SPIE 7466, Advanced Wavefront Control: Methods, Devices, and Applications VII, 74660E (12 August 2009); doi: 10.1117/12.828384; https://doi.org/10.1117/12.828384
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KEYWORDS
Actuators

Mirrors

Adaptive optics

Microelectromechanical systems

Iris

Semiconducting wafers

Surface finishing

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