29 September 2009 A non-destructive metrology solution for detailed measurements of imprint templates and media
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Abstract
This study investigates a non-destructive optical metrology technique, that furnishes measurement solutions for hard drive discrete track recording (DTR) and bit patterned media (BPM) templates and imprints. From the measurement and analysis of polarized reflectance and transmittance, feature height and profile of DTR and BPM templates and imprints, as well as residual layer thickness of imprints, are accurately determined, and uniformity maps of these parameters are produced in a fraction of a minute. Simulations of theoretical polarized reflectance and transmittance, relating to next generation structures, demonstrate that the optical metrology solution has capability for future products.
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Jeffrey Roberts, Jeffrey Roberts, Linlin Hu, Linlin Hu, Torbjörn Eriksson, Torbjörn Eriksson, Kristian Thulin, Kristian Thulin, Babak Heidari, Babak Heidari, } "A non-destructive metrology solution for detailed measurements of imprint templates and media", Proc. SPIE 7488, Photomask Technology 2009, 74881Z (29 September 2009); doi: 10.1117/12.833465; https://doi.org/10.1117/12.833465
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