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Yeonah Shim, Sungho Jun, Jaeyoung Choi, Kwangseon Choi, Jae-won Han, Kechang Wang, John McCarthy, Guangming Xiao, Grace Dai, DongHwan Son, Xin Zhou, Thomas Cecil, David Kim, KiHo Baik, "Patterning of 90nm node flash contact hole with assist feature using KrF," Proc. SPIE 7488, Photomask Technology 2009, 748837 (23 September 2009);