23 September 2009 On comparing conventional and electrically driven OPC techniques
Author Affiliations +
Abstract
This paper compares the range of accepted layouts produced by conventional Shape Driven Proximity Correction (SDOPC) and Electrically Driven Optical Proximity Correction (EDOPC). For SDOPC, correction is made until a target geometry matches a layout. In EDOPC, current matching is the primary objective.1-6 Using electrical objectives results in a smaller fragmentation requirement for an equivalent current accuracy as SDOPC. Number of candidate OPC solutions accepted by EDOPC is orders of magnitude higher than SDOPC leading to potentially much faster convergence. Moreover, due to additional flexibility in EDOPC, it is able to correct several layouts which are not correctable by SDOPC with the same fragmentation.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dominic Reinhard, Puneet Gupta, "On comparing conventional and electrically driven OPC techniques", Proc. SPIE 7488, Photomask Technology 2009, 748838 (23 September 2009); doi: 10.1117/12.833502; https://doi.org/10.1117/12.833502
PROCEEDINGS
8 PAGES


SHARE
Back to Top