What is a good empirical model?

Eldar Khaliullin; Yaogang Lian; Mark Davey; Xin Zhou

doi:10.1117/12.829731

23 September 2009 What is a good empirical model?

Eldar Khaliullin, Yaogang Lian, Mark Davey, Xin Zhou

Proceedings Volume 7488, Photomask Technology 2009; 74883P (2009) https://doi.org/10.1117/12.829731
Event: SPIE Photomask Technology, 2009, Monterey, California, United States

Abstract

An accurately predictive process model is of utmost importance to the traditional Optical Proximity Correction (OPC), the leading-edge Inverse Lithography Technology (ILT), or other simulation software for IC manufacturing. There are many parameters and methods in constructing and calibrating a model. But it is difficult to obtain a good empirical model, partly because the assessment of the final result is lacking in terms of quantitative and objective metrics. We set out to define certain practical guidelines, e.g. Model Effectiveness Standard Index (MESI), for analyzing parameter uncertainty and estimating simulation uncertainty of an empirical model, so that we know what to choose among many similar candidates. The discussion is framed in the estimation theory of statistics.

Citation Download Citation

Eldar Khaliullin, Yaogang Lian, Mark Davey, and Xin Zhou "What is a good empirical model?", Proc. SPIE 7488, Photomask Technology 2009, 74883P (23 September 2009); https://doi.org/10.1117/12.829731

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