Scanning Tunneling Microscopy (STM) Of A Diamond-Turned Surface And A Grating Replica

R. A. Dragoset; T. V. Vorburger

doi:10.1117/12.939841

20 April 1987 Scanning Tunneling Microscopy (STM) Of A Diamond-Turned Surface And A Grating Replica

R. A. Dragoset, T. V. Vorburger

Proceedings Volume 0749, Metrology: Figure and Finish; (1987) https://doi.org/10.1117/12.939841
Event: OE LASE'87 and EO Imaging Symposium, 1987, Los Angeles, CA, United States

Abstract

The technique of scanning tunneling microscopy has been applied to topographic mapping of two optical surfaces -- a ruled grating replica and a diamond-turned gold mirror. By taking measurements with both a scanning tunneling microscope and a conventional stylus instrument, we have compared profiles and power spectral density (PSD) functions calculated from the profiles of a grating replica. Furthermore, surface structure was observed and PSD's were calculated for a diamond-turned surface measured with a STM. No structure was detected by the stylus instrument due to the spacing of the grooves on the diamond-turned sample. These measurements yield information necessary to gaining a better understanding of the diamond-turning process.

Citation Download Citation

R. A. Dragoset and T. V. Vorburger "Scanning Tunneling Microscopy (STM) Of A Diamond-Turned Surface And A Grating Replica", Proc. SPIE 0749, Metrology: Figure and Finish, (20 April 1987); https://doi.org/10.1117/12.939841

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