20 October 2009 Research on piezoelectricity materials films of MEMS surface acoustic wave gas sensor
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Proceedings Volume 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering; 74935C (2009) https://doi.org/10.1117/12.840328
Event: Second International Conference on Smart Materials and Nanotechnology in Engineering, 2009, Weihai, China
Abstract
The structure of SAW gas sensor based on the PZT film is provided, which includes mainly the PZT piezoelectric thick film, interdigital transducers and gas sensing films. The PZT piezoelectric thick film is fabricated on the structure of Au/Cr/SiO2/Si multilayer films. The fabrication technology of PZT film is also discussed which is compatible with the MEMS fabrication technology. The measurement results show that the remanent polarization and the coercive field of PZT thick films are up to 60μC/cm2 and 23kV/cm at 25V, respectively, and the results demonstrate that the siliconbased PZT thick films possess well property which suitable for SAW device for farther application.
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Chengjun Qiu, Dan Bu, Hongmei Liu, Yafei Feng, "Research on piezoelectricity materials films of MEMS surface acoustic wave gas sensor", Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 74935C (20 October 2009); doi: 10.1117/12.840328; https://doi.org/10.1117/12.840328
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