20 October 2009 Design and fabrication of a microfluidic chip driven by dielectric elastomers
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Proceedings Volume 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering; 74935S (2009) https://doi.org/10.1117/12.838431
Event: Second International Conference on Smart Materials and Nanotechnology in Engineering, 2009, Weihai, China
Abstract
This paper presents a valveless microfluidic chip driven by dielectric elastomers (DEs). First, the planar DE actuator is designed and the diaphragm actuating performances were characterized. Then the micro chip, containing a pump chamber and a pair of nozzle/diffuser, is fabricated on SU-8 under exposure to UV-light with a mask. The diaphragm and the SU-8 is sealed and finally covered by a PMMA. The pumping and flow rate is tested and measured under high AC supply, and a maxim flow rate of 21.2μl is achieved under 3500V, 8Hz sine wave.
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Bo Li, Bo Li, Hualing Chen, Hualing Chen, Jiuhui Wu, Jiuhui Wu, Zicai Zhu, Zicai Zhu, Dongmei Xia, Dongmei Xia, Sufang Jing, Sufang Jing, } "Design and fabrication of a microfluidic chip driven by dielectric elastomers", Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 74935S (20 October 2009); doi: 10.1117/12.838431; https://doi.org/10.1117/12.838431
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