Translator Disclaimer
Paper
20 October 2009 Design and fabrication of a microfluidic chip driven by dielectric elastomers
Author Affiliations +
Proceedings Volume 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering; 74935S (2009) https://doi.org/10.1117/12.838431
Event: Second International Conference on Smart Materials and Nanotechnology in Engineering, 2009, Weihai, China
Abstract
This paper presents a valveless microfluidic chip driven by dielectric elastomers (DEs). First, the planar DE actuator is designed and the diaphragm actuating performances were characterized. Then the micro chip, containing a pump chamber and a pair of nozzle/diffuser, is fabricated on SU-8 under exposure to UV-light with a mask. The diaphragm and the SU-8 is sealed and finally covered by a PMMA. The pumping and flow rate is tested and measured under high AC supply, and a maxim flow rate of 21.2μl is achieved under 3500V, 8Hz sine wave.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bo Li, Hualing Chen, Jiuhui Wu, Zicai Zhu, Dongmei Xia, and Sufang Jing "Design and fabrication of a microfluidic chip driven by dielectric elastomers", Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 74935S (20 October 2009); https://doi.org/10.1117/12.838431
PROCEEDINGS
9 PAGES


SHARE
Advertisement
Advertisement
Back to Top