Characteristic of TiNi(Cu) shape memory thin film based on micropump

Huijun Zhang; Chengjun Qiu

doi:10.1117/12.840655

20 October 2009 Characteristic of TiNi(Cu) shape memory thin film based on micropump

Huijun Zhang, Chengjun Qiu

Proceedings Volume 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering; 74936X (2009) https://doi.org/10.1117/12.840655
Event: Second International Conference on Smart Materials and Nanotechnology in Engineering, 2009, Weihai, China

Abstract

Shape memory thin films offer a unique combination of novel properties and have the potential to become a primary actuating mechanism for micropumps. In this study, a micropump driven by TiNiCu shape memory thin film is designed and fabricated. The micropump is composed of a TiNiCu/Si bimorph driving membrane, a pump chamber and two inlet and outlet check valves. The property of TiNiCu films and driving capacity of TiNiCu/Si bimorph driving membrane are investigated. By using the recoverable force of TiNiCu thin film and biasing force of silicon membrane, the actuation diaphragm realizes reciprocating motion effectively. Experimental results show that the film surface appears a smooth and featureless morphology without any cracks, and the hysteresis width ΔT of TiNiCu film is about 2-3°C, the micropump driving by TiNiCu film has good performance, such as high pumping yield, high working frequency, stable driving capacity, and long fatigue life time.

Citation Download Citation

Huijun Zhang and Chengjun Qiu "Characteristic of TiNi(Cu) shape memory thin film based on micropump", Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 74936X (20 October 2009); https://doi.org/10.1117/12.840655

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