31 December 2009 Early thermal damage in optical coatings identified by infrared spectral signatures
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Laser induced damage can take several forms. Perhaps the most common is thermal breakdown, caused by heating of the coating to a catastrophic failure induced by local melting, delamination, evaporation, or some other change. We demonstrate that micromachined dielectric membranes show strong differences in their hydroxyl signatures as measured by Fourier transform infrared spectroscopy. The changes correspond to regions of high fluence (3200 J/cm2) from a Nd:YAG laser. It is found that the absorption peaks associated with O-H stretching mode decrease after laser treatment, indicating a reduction in the number of film hydroxyl groups.
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Sangho S. Kim, Nicholas T. Gabriel, Wing S. Chan, Joseph J. Talghader, "Early thermal damage in optical coatings identified by infrared spectral signatures", Proc. SPIE 7504, Laser-Induced Damage in Optical Materials: 2009, 75041A (31 December 2009); doi: 10.1117/12.835783; https://doi.org/10.1117/12.835783

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