Development of deformable mirror for spherical aberration compensation

Sunao Aoki; Masahiro Yamada; Tamotsu Yamagami

doi:10.1117/12.838530

31 July 2009 Development of deformable mirror for spherical aberration compensation

Sunao Aoki, Masahiro Yamada, Tamotsu Yamagami

Proceedings Volume 7505, Optical Data Storage 2009; 750513 (2009) https://doi.org/10.1117/12.838530
Event: Optical Data Storage, 2009, Lake Buena Vista, Florida, United States

Abstract

By using conventional MEMS processes, we have successfully developed a high accuracy and easily controllable deformable mirror with simple structure. Our deformable mirror is driven by a single actuator different from a conventional deformable mirror of multi-actuator type. The deformed shape is controlled by giving strength distribution on the reverse side of the mirror. Furthermore, we have obtained a reflective film of low stress which had previously been a challenge.

Citation Download Citation

Sunao Aoki, Masahiro Yamada, and Tamotsu Yamagami "Development of deformable mirror for spherical aberration compensation", Proc. SPIE 7505, Optical Data Storage 2009, 750513 (31 July 2009); https://doi.org/10.1117/12.838530

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