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31 July 2009 Development of deformable mirror for spherical aberration compensation
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Proceedings Volume 7505, Optical Data Storage 2009; 750513 (2009) https://doi.org/10.1117/12.838530
Event: Optical Data Storage, 2009, Lake Buena Vista, Florida, United States
Abstract
By using conventional MEMS processes, we have successfully developed a high accuracy and easily controllable deformable mirror with simple structure. Our deformable mirror is driven by a single actuator different from a conventional deformable mirror of multi-actuator type. The deformed shape is controlled by giving strength distribution on the reverse side of the mirror. Furthermore, we have obtained a reflective film of low stress which had previously been a challenge.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sunao Aoki, Masahiro Yamada, and Tamotsu Yamagami "Development of deformable mirror for spherical aberration compensation", Proc. SPIE 7505, Optical Data Storage 2009, 750513 (31 July 2009); https://doi.org/10.1117/12.838530
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